edited by M. Lesieur, A. Yaglom and F. David

EDP sciences , Springer c2001

: Springer , : EDP sciences

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sponsored by Concordia University ... [ et al.] ; editors: Michel Abida, Christine Collet, Bipin C. Desai

IEEE Computer Society c2001

: case

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with the scientific support of GRESSI (Grenoble Submicron Silicon), INPG (Institut National Polytechnique Grenoble) ; with the financial help of CEA-LETI (Laboratorie d'Electronique, de Technologie et d'Instrumentation ... [et al.] ; sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'Education nationale, de l'Enseignement supérieue et de la Recherche, IEEE-EDS

Société Française du Vide 1997

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