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容易かつ廉価な多チャンネル柔軟神経電極の作製法の開発(<特集>生体医工学シンポジウム2008)
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加藤 康広
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牧 勝弘
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古川 茂人
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柏野 牧夫
… This paper provides an easier and inexpensive method for fabricating flexible multichannel neural electrodes based on photosensitive material by using Micro Electro Mechanical System technologies. … The dry etching process requires expensive machinery and maintenance cost, and involves complex multilevel processes for controlling etching conditions to define the outline of the neural electrodes and to expose the microelectrodes for detecting neural signals. …
生体医工学 : 日本エム・イー学会誌 46(5), 522-528, 2008-10-10
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医中誌
被引用文献3件