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Crystal Plasticity Analysis of Dislocation Accumulation in Impurity Doped-ULSI Cells
[in Japanese]
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SATO Michihiro
,
OHASHI Tetsuya
,
MARUIZUMI Takuya
,
KITAGAWA Isao
… On the other hand, impurity doping is an indispensable process for the device fabrication, and also important in dislocation accumulation. … Possibilities for the control of dislocation accumulation in impurity doped-ULSI cells are discussed. …
Transactions of the Japan Society of Mechanical Engineers. A 75(756), 1057-1062, 20090825
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