検索結果 21件中 1-20 を表示

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  • Effects of Process Parameters on Replication Accuracy of Microinjection Molded Cyclic Olefins Copolymers Parts

    Lin Hsuan-Liang , Chen Chun-Sheng , Lee Ruey-Tsung , Chen Shia-Chung , Chien Rean-Der , Jeng Ming-Chang , Hwang Jiun-Ren

    LIGA-like processes were utilized to prepare a silicon-based SU-8 photoresist, followed by electroforming to make a Ni--Co-based stamp. …

    Jpn J Appl Phys 52(4), 044001-044001-5, 2013-04-25

    応用物理学会

  • LIGAライクプロセスを用いた微小感熱素子の作製

    堀川 教世 , 春山 義夫 , 島 聡史

    富山県立大学紀要 19, pp24-29, 2009-03

    CiNii PDF - オープンアクセス 

  • Eight-Phase-Level Diffractive Microlens for Beam Splitting Using LIGA-Like Process

    Yang Jauh-Jung , Liao Yunn-Shiuan , Chen Chi-Feng

    … An eight-level diffractive microlens (DML) array for beam splitting is designed and fabricated by a LIGA-like process. … Tetraethoxysilane (TEOS) oxide etching and specially designed demold techniques were developed and employed in the fabrication process to minimize the related processing errors such as misalignment and tilting so that the accuracy of DML could be ensured. …

    Jpn J Appl Phys 45(4A), 2817-2823, 2006-04-15

    応用物理学会

  • Surface Integrity of Thick Photo Resist Finished by Ultra-Precision Diamond Cutting(Ultra-precision machining)

    OKUDA Koichi , NAKAGAWA Shusaku , FUJIWARA Naoki , UTSUMI Yuichi , SAKAI Nobuji , HATTORI Tadashi

    … A good surface flatness of photo resist is needed to make three-dimensional micro structure by multi-layer LIGA-like process. … In this study, an ultra-precision cutting technology is applied to UV lithography process in order to fabricate a flat structure of thick photo resist. …

    Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005(3), 1041-1046, 2005-10-18

  • マイクロフォーカスX線検査装置用Niグリッドマスクの開発

    安井 学 , 佐々木 洋明 , 平林 康男 [他] , 和久田 昌則

    … We fabricated the Ni grid mask using LIGA-like process. …

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 125(4), 196-199, 2005-04-01

    J-STAGE DOI 参考文献6件

  • Simulation Analysis and Experimental Verification of LIGA-Like Process for Ni–Fe Micromold Insert with Taper Angle

    Fu Ming-Nan , Yeh Yih-Min , Tu George-Chia

    … The LIGA (a German acronym for lithographie, gavanoformung, abformung) (or LIGA-like) process involving lithography, electroforming, and molding is one of the most important microfabrication technologies for fabricating high-aspect-ratio 3-D microstructures. …

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 43(11A), 7756-7763, 2004-11-15

    応用物理学会 参考文献30件

  • Development, Strength and Functional Evaluation of Plastic Microneedle Array Fabricated by Injection Molding

    Yoshimura Chisato , Ishikawa Hiroyuki , Furuta Shinji [他] , AOKI Hikoharu , SUGIYAMA Susumu

    … The resist patterns were pre-formed by three-dimensional fine manufacturing with movable resist during the exposure in LIGA process. … Polylactic acid was used for microneedle arrays in consideration of the prospective medical use in transdermal methods and the like. …

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 124(10), 387-392, 2004-10-01

    DOI 参考文献8件 被引用文献3件

  • 電鋳技術を用いたMEMS

    安井 学 , 平林 康男 , 藤田 博之

    表面技術 = The Journal of the Surface Finishing Society of Japan 55(4), 226-231, 2004-04-01

    J-STAGE DOI 参考文献27件 被引用文献3件

  • Simulation Analysis and Experimental Verification of LIGA-Like Process for Ni-Fe Micromold Insert with Taper Angle

    Fu Ming-Nan , Yeh Yih-Min , Tu George-Chia

    … The LIGA (a German acronym for lithographie, gavanoformung, abformung) (or LIGA-like) process involving lithography, electroforming, and molding is one of the most important microfabrication technologies for fabricating high-aspect-ratio 3-D microstructures. …

    Japanese Journal of Applied Physics 43(11A), 7756-7763, 2004

    J-STAGE DOI

  • Fabrication of a TiC/Ti<SUB>5</SUB>Si<SUB>3</SUB> Nano-Grained Composite for Micro-Parts by Pseudo-Superplastic Deformation

    Miyano Naoki , Iwasa Hiroshi , Isonishi Kazuo , Ameyama Kei

    … We apply the PM process in combination with mechanical alloying (MA) and Spark Plasma Sintering (SPS) to produce micro-parts using a ceramic composite, TiC/Ti<SUB>5</SUB>Si<SUB>3</SUB>. … After the alloying, the MA powder whose average particle size is 20∼30 μm, has amorphous-like structures. …

    MATERIALS TRANSACTIONS 45(8), 2552-2557, 2004

    DOI

  • マイクロコネクタの自動着脱機構

    高田 博史 , 奥山 浩 , 羽賀 剛 [他] , 平田 嘉裕

    … The electrical terminals and guides are fabricated by deep X-ray lithography and electroforming (LIGA-like process). …

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 123(11), 487-492, 2003-11-01

    J-STAGE DOI 参考文献6件

  • MA-SPS 粉末焼結法の LIGA プロセスへの応用

    宮野 公樹 , 多賀谷 和範 , 川瀬 和典 [他] , 飴山 惠 , 杉山 進

    … Reproduction techniques, like an injection molding or micro-powder injection metallurgy or embossing, are one of the methods which provide microstructures of wide variety of materials and of the production method as a application of LIGA process. … In this study, we develop a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using Spark Plasma Sintering (SPS) machine. …

    材料 52(7), 783-788, 2003-07-15

    CiNii PDF - オープンアクセス  J-STAGE DOI 参考文献10件 被引用文献1件

  • 632 Current Status of LIGA Process at "NewSUBARU"

    Mekaru Harutaka , Utsumi Yuichi , Hattori Tadashi

    LIGA process is a total micro-fabrication technology includes X-ray lithography, electroforming for micro metal, and replication. … The replication processes like hot embossing and injection molding are very important because these techniques of a wide variety of materials for a reasonable price to micro system. …

    JSME Materials and Processing Conference (M&P) 10(2), 589-592, 2002

  • 317 マイクロ機械加工法とフォトリソグラフィを組み合わせた微細構造創成の試み(OS6 マイクロ加工(2))

    金 俊完 , 山形 豊 , 森田 晋也 , 守安 精 , 大森 整 , 樋口 俊郎

    … To make three-dimensional complex structures by multi-layer LIGA-like process, or to fabricate simple columnar structures that require their surface performance, good surface flatness and high resolution are needed. … We introduced a single point diamond turning (SPDT) as a cutting technology and Electrolytic in-process dressing (ELID) grinding as a grinding one for fabricating flat structure of thick resist, that is SU-8, and electroplated nickel. …

    生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会 2001(3), 225-226, 2001-11-20

  • マイクロマシニングとしてのニッケル電鋳技術の応用

    安井 学 , 平林 康男 , 藤田 博之 [他]

    表面技術 = The Journal of the Surface Finishing Society of Japan 52(11), 734-737, 2001-11-01

    J-STAGE DOI 参考文献17件 被引用文献1件

  • TIEGA技術を用いた三次元微細加工

    加藤 隆典

    … We have carried out three-dimensional (3-D) micromachinig of PTFE with the TIEGA process, a LIGA-like process which by replaces hard x-ray lithography with synchrotron radiation (SR) direct-photo etching. …

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 120(7), 375-376, 2000-07-01

    J-STAGE DOI 参考文献4件

  • ディープX線リソグラフィーを基本とする3次元微細加工を用いたマイクロコネクタの開発

    羽賀 剛 , 奥山 浩 , 平田 嘉裕 [他] , 高田 博史

    … These structures are fabricated using the LIGA-like process. … The cantilever shape terminals as moving structures (7- m-width, 8O- m-height and 300- m-length) were fabricated using the one-layer sacrificial process. … The tapered terminals and guides for the smooth connection were fabricated by micro-electro-discharge-machining combined with the LIGA-like process. …

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 120(7), 363-369, 2000-07-01

    機関リポジトリ J-STAGE DOI 参考文献10件 被引用文献1件

  • 厚膜レジストSU-8によるLIGAライクプロセス

    川畑 達央

    表面技術 = The Journal of the Surface Finishing Society of Japan 50(11), 956-960, 1999-11-01

    J-STAGE DOI 参考文献5件

  • MEMS材料としてのNi-W合金メッキ膜

    池田 英広 , 井奥 淳 , 藤田 孝之 [他] , 前中 一介 , 前田 宗雄

    … In micro mechanical devices with high aspect ratios, LIGA or LIGA-like processes are commonly used. … In such a process, the material of the device structure is electroplated with nickel or copper because of ease of deposition. …

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(11), 598-603, 1999-11

    J-STAGE DOI 参考文献12件

  • 薄膜Ni-W合金の諸特性について

    池田 英広 , 井奥 淳 , 藤田 孝之 , 前中 一介 , 前田 宗雄

    電気学会研究会資料. SMP, センサ材料・プロセス技術研究会 1998(10), 31-36, 1998-11-05

    参考文献11件

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