CiNii Articles - Laser-micromachining

1

Report on LPM2010 [in Japanese]

中村奨 , 岡本康寛

レーザ加工学会誌 18(2), 108-114, 2011-06-00
2

International conference report: Report on COLA2009 [in Japanese]

塚本雅裕 , 中野人志 , 前元利彦

Journal of Japan Laser Processing Society 18(1), 28-32, 2011-02-00
3

Metallization of Oxide/Hydroxide Film of Aluminum : the Palladium Activation Techniques

JHA Himendra , KIKUCHI Tatsuya , SAKAIRI Masatoshi , TAKAHASHI Hideaki

… Removal of the surface hydroxide layer using a laser beam, exposes the palladium acetate, which also undergoes photothermal decomposition and reduction to metallic palladium and acts as a catalytic center for subsequent electroless plating. …

Journal of The Surface Finishing Society of Japan 60(3), 208-212, 2009-03-01

J-STAGE CrossRef References (12)
4

International conference report: Report on LPM2008 [in Japanese]

田辺里枝 , 塚本雅裕 , 福田直晃

Journal of Japan Laser Processing Society 16(1), 34-37, 2009-03-00
5

Development of Minimally Invasive Medical Tools Using Laser Processing on Cylindrical Substrates [in Japanese]

HAGA Yoichi , MUYARI Yuta , GOTO Shoji , MATSUNAGA Tadao , ESASHI Masayoshi

… This paper reports micro-fabrication techniques using laser processing on cylindrical substrates for the realization of high-performance multifunctional minimally invasive medical tools with small sizes. … A spring-shaped shape memory alloy (SMA) micro-coil with a square cross section has been fabricated by spiral cutting of a Ti-Ni SMA tube with a femtosecond laser. …

IEEJ Transactions on Sensors and Micromachines 128(10), 402-409, 2008-10-01

J-STAGE CrossRef References (17) Cited by (3)
6

High-Performance 76-GHz Planar Gunn VCO

FUKASAWA Yoshimichi , KAWAGUCHI Kiyoshi , YOSHIDA Takashi , SUGIYAMA Takahiro , NAKAGAWA Atsushi

… A 76-GHz Gunn voltage-controlled oscillator (VCO) with a high output power and a wide tuning-frequency range was fabricated by optimizing VCO circuits and using laser micromachining. … Since laser micromachining was used in fabricating the Gunn VCO, the reproducibility of its RF performance was improved. …

IEICE Transactions on Electronics 91(7), 1098-1103, 2008-07-01

J-STAGE CrossRef References (5)
7

Microchip fabrication by laser micromachining and its applications [in Japanese]

HANADA Yasutaka , SUGIOKA Koji , MIDORIKAWA Katsumi , KAWANO Hiroyuki , ISHIKAWA Ikuko , MIYAWAKI Atsushi

電気学会研究会資料. OQD, 光・量子デバイス研究会 2008(17), 7-10, 2008-03-07

References (17)
8

Micromachining of glass by using a Nd : YAG (532nm) laser for the optical device

KIM T. H. , LEE K. H. , JUNG Y. J. , KIM Y. S. , CHIN H. J. , RYU B. K. , KANG H. O. , LEE S. H.

… Suitable types of glass for laser micromachining using a Nd:YAG laser have been developed. … After machining with the 2nd harmonic beams of a pulsed Nd:YAG laser, the bump in the glass host, the pit at the bump in the glass host and the sole pit were all formed. … We found that the Co ions acted as sensitizers in the laser machining of the glass and this process can be used for optical device fabrication process. …

Journal of the Ceramic Society of Japan 116(1350), 309-312, 2008-02-01

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9

Laser micromachining of porous anodic alumina film

JHA H. , Kikuchi Tatsuya , Sakairi Masatoshi , Takahashi Hideaki

… A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. … Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. … Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. …

Appl. Phys. A 88(4), 617-622, 2007-09-00

IR CrossRef Cited by (3)
10

1414 Fabrication of 3-dimensional microstructures using focused laser beam [in Japanese]

SENBA Takuya , YAMAGUCHI Tetsuro , HARADA Takeshi

… Development of a high-speed microfabrication technique using focused laser beam was conducted. … A glass-like carbon having over 80% laser beam absorptivity and 650MHv hardness was employed as a workpiece. … Shifting laser focal point from the work surface could control a depth of the square pocket, so that a high-speed roughing by adjusting focal point on the work surface could be conducted. …

年次大会講演論文集 : JSME annual meeting 2006(4), 45-46, 2006-09-15

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11

Femtosecond Laser Micromachining(<Special Issue>Frontier of Precision Processing and Measurement by Ultrashort Pulse Laser) [in Japanese]

OBARA Minoru

Journal of the Japan Society of Precision Engineering 72(8), 943-946, 2006-08-05

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12

Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding

YAGYU Hiromasa , HAYASHI Shigehiko , TABATA Osamu

… First, an inversed conical hole with a sharp tip and a high aspect ratio was fabricated by irradiating a low power output Nd:YVO4-SHG laser beam for several milliseconds on Au nanoparticles dispersed ethylcellulose. …

IEEJ Transactions on Sensors and Micromachines 126(1), 7-13, 2006-01-01

J-STAGE CrossRef References (16) Cited by (4)
13

Precision Machining of a Micro Parabolic Body using a Five Axis Laser Micromachining System [in Japanese]

KAWAMURA Y.

レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 341, 11-13, 2005-11-17

References (1)
14

Freestanding optical fibers fabricated in a glass chip using femtosecond laser micromachining for lab-on-a-chip application

CHENG Y.

Opt. Express 12, 7225, 2005

CrossRef Cited by (1)
15

Thick polymer cover layers for laser micromachining of fine holes

LI Z. L.

Appl. Phys. A 81, 753-758, 2005

CrossRef Cited by (6)
16

Creation of Spherical surface using Pico second Pulsed Laser [in Japanese]

SHINABE Masahide , EDA Hiroshi , ZHOU Libo , SHIMIZU Jun , OJIMA Hirotaka

… Laser machining is one of the most promising technologies for micro-fabrication as it benefits from its high power density, micron sized spot and non-contact accessibility. … In most conventional Laser machining process however, the material is removed above its melting temperature by transforming the Laser power into heat energy. … On the other hand, the material is also possible to be removed by a behavior called "ablation" if the incoming Laser power is big enough. …

The ... Manufacturing & Machine Tool Conference 2004(5), 179-180, 2004-11-19

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17

Analysis of thermal damage in bulk silicon with femtosecond laser micromachining

COYNE E

Proc. SPIE 5339, 73-83, 2004

Cited by (2)
18

Femtosocond pulsed laser micromachining of glass substrates with application to microfluidic device

GIRIDHAR M. S.

Applied Optics. 43(23), 4584-4589, 2004

CrossRef Cited by (2)
19

Direct-write laser micromachining and universal surface modification of PMMA for device development

CHENG J. Y.

Sensors and Actuators B 99, 186-196, 2004

CrossRef Cited by (1)
20

Microfabrication of Glass by Advanced Laser Processing [in Japanese]

SUGIOKA Koji

セラミックス 38(11), 880-883, 2003-11-01

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