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3-Dimensional Numerical Simulations of Natural Convection in Autoclave
[in Japanese]
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Ito Tomoaki
,
Kikuchi Masanori
,
Hirano Kimitaka
… The micro manufacturing technology such as the photolithography technology is widely applied in an electronic industrial field. … To keep the high quality, it is necessary to prevent micro particle called Inclusion from mixing internally during the growth process of crystal. …
Memoirs of the Faculty of Engineering, Miyazaki University 39, 239-246, 2010-09-30
IR