Wang Kwang-Ru
,
Mauder Christof
,
Wan Qian
,
Jenichen Bernd
,
Woitok Joachim F.
,
Grahn Holger T.
,
Kalisch Holger
,
Heuken Michael
,
Vescan Andrei
,
Trampert Achim
Using X-ray reflectivity (XRR) measurements and high-resolution transmission electron microscopy (HRTEM), we demonstrate that a thin AlN layer is formed on top of a \gamma-LiAlO2(100) substrate by a n …
Applied Physics Express 5(10), 105501-105501-3, 2012-10-25
The Japan Society of Applied Physics