検索結果:　 485件中 1-20 を表示

Kawamura Yumi , Hattori Nozomu , Miyatake Naomasa [他] , Horita Masahiro , Uraoka Yukiharu

… We investigated zinc oxide (ZnO) thin films prepared by plasma-assisted atomic layer deposition (PA-ALD), and thin film transistors (TFTs) with the ALD ZnO channel layer for application to next-generation displays. … The dependences of the electrical characteristics of the fabricated TFTs on the plasma condition were evaluated. …

Jpn J Appl Phys 50(4), 04DF05-04DF05-4, 2011-04-25

応用物理学会

村井 隆一 , 川島 正裕 , 打土井 正孝

電気学会研究会資料. EDD, 電子デバイス研究会 2010(76), 33-36, 2010-11-18

参考文献2件

Ishijima Tatsuo , Nojiri Yasunori , Toyoda Hirotaka [他] , Sugai Hideo

… A vacuum-sealed antenna coupler was newly developed for excitation of meter-scale high-density surface wave plasma for manufacturing giant microelectronics devices such as liquid crystal displays and thin-film solar cells. … To produce large-area uniform plasma, various multislot antenna designs at 2.45 GHz were investigated by slot antenna analysis and simulation using the finite difference time domain (FDTD) method. …

Jpn J Appl Phys 49(8), 086002-086002-5, 2010-08-25

応用物理学会

Serizawa Kazumi , Onuma Hiroaki , Kikuchi Hiromi [他] , Kazuma Suesada , Masaki Kitagaki , Itaru Yamashita , Ryuji Miura , Ai Suzuki , Hideyuki Tsuboi , Nozomu Hatakeyama , Akira Endou , Hiromitsu Takaba , Momoji Kubo , Hiroshi Kajiyama , Akira Miyamoto

… MgO protecting layers, which have high ion induced secondary electron emission coefficient ($\gamma$), are required in order to decrease the firing voltage of plasma displays. …

Jpn J Appl Phys 49(4), 04DJ14-04DJ14-4, 2010-04-25

応用物理学会

村井 隆一 , 川島 正裕 , 打土井 正孝

研究会講演予稿 253, 33-36, 2010-11-18

Uchida Giichiro , Uchida Satoshi , Kajiyama Hiroshi , Shinoda Tsutae , ウチダ ギイチロウ , ウチダ サトシ , カジヤマ ヒロシ , シノダ ツタエ , 内田 儀一郎 , 内田 諭 , 梶山 博司 , 篠田 傳

… We present here analysis of electron energy of a micro dielectric barrier discharge (micro-DBD) for alternating-current plasma display panel (ac-PDP) with Ne/Xe gas mixture by using the optical emission spectroscopy (OES). … The influences of plasma parameters such as electron temperature on luminous efficacy are also theoretically analyzed using one-dimensional fluid model. …

Journal of Applied Physics 107(2), 2010

機関リポジトリ CrossRef