Fukamachi Kohei
,
Sakamoto Naonori
,
Ohno Tomoya
,
Fu Desheng
,
Wakiya Naoki
,
Matsuda Takeshi
,
Suzuki Hisao
… (LNO) thin-film oxide electrodes were deposited on Si substrates by a chemical solution deposition (CSD) to control the residual stress in sputtered BaTiO<sub>3</sub> …
Jpn J Appl Phys 50(9), 09NA03-09NA03-4, 2011-09-25
The Japan Society of Applied Physics