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Si Substrate Resistivity Design for On-Chip Matching Circuit Based on Electro-Magnetic Simulation
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ONO Masayoshi
,
SUEMATSU Noriharu
,
KUBO Shunji
,
NAKAJIMA Kensuke
,
IYAMA Yoshitada
,
TAKAGI Tadashi
,
ISHIDA Osami
… For on-chip matching Si-MMIC fabricated on a conventional low resistivity Si substrate, the loss of on-chip inductors is quite high due to the dielectric loss of the substrate. … In order to reduce the loss of on-chip matching circuit, the use of high resistivity Si substrate is quite effective. …
IEICE transactions on electronics E84-C(7), 923-930, 2001-07-01
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