Miyake Yumiko
,
Akita Yasuyuki
,
Oi Hideo
,
Mita Masahiro
,
Kaneko Satoru
,
Koyama Kohji
,
Sunagawa Kazuhiko
,
Tada Kazuhiro
,
Hirai Yoshihiko
,
Yoshimoto Mamoru
… We examined the conditions for the development of atomically stepped ultrasmooth surfaces on commercial silicate glass substrates by the thermal nanoimprint technique using sapphire ($\alpha$-Al<sub>2</sub>O<sub>3</sub> … Under the pressing conditions of 3 MPa, 300 s, and 610 °C for imprinting, a 0.2-nm-high stepped and atomically ultrasmooth terraced surface could be formed on soda-lime silicate glass substrates having the glass transition temperature of 521 °C. …
Jpn J Appl Phys 50(7), 078002-078002-2, 2011-07-25
The Japan Society of Applied Physics