Iwaya Takamitsu
,
Akao Shingo
,
Sakamoto Toshihiro
,
Tsuji Toshihiro
,
Nakaso Noritaka
,
Yamanaka Kazushi
… In this study, we fabricated a robust and inexpensive high-precision metal MEMS column by combining diffusion-bonded etched stainless-steel plates with alignment evaluation using acoustic microscopy. … As an application, we fabricated a palm-size surface acoustic wave (SAW) GC combining this column with a ball SAW sensor and succeeded in separating and detecting a mixture of volatile organic compounds. …
Jpn J Appl Phys 51(7), 07GC24-07GC24-6, 2012-07-25
The Japan Society of Applied Physics