Kuramochi Hideto
,
Akiike Ryo
,
Iigusa Hitoshi
,
Tamano Kimiaki
,
Utsumi Kentaro
,
Shibutami Tetsuo
,
Sichanugrist Porponth
,
Konagai Makoto
… We have developed novel aluminum-doped zinc oxide films (AZO-X and AZO-HX films) with a high haze value using wet-chemical etching for various times after dc magnetron sputtering, and have investigated their electrical and optical properties, durability under high-humidity condition, and surface morphology. …
Jpn J Appl Phys 51(10), 10NB13-10NB13-4, 2012-10-25
The Japan Society of Applied Physics