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Search Results:　 1-20 of 57

1

Investigation of forming SiO_2 Electret on Comb-drive actuator [in Japanese]

SUGIYAMA Tatsuhiko , AOYAMA Mitsuru , HASHIGUCHI Gen , SUZUKI Masato

電気学会研究会資料. PHS, フィジカルセンサ研究会 2011(19), 35-36, 2011-06-30

References (2)
2

SiO Electret Generated by Potassium Ions on a Comb-Drive Actuator

Sugiyama Tatsuhiko , Aoyama Mitsuru , Shibata Yasushi [他]

Applied physics express : APEX 4(11), 114103-1-3, 2011-11
3

Analysis of a Comb-Drive Actuator Taking the Depletion Layer into Consideration [in Japanese]

UEKI Shinji , NISHIMORI Yuki , IMAMOTO Hiroshi , KUBOTA Tomohiro , SUGIYAMA Masakazu , SAMUKAWA Seiji , HASHIGUCHI Gen

… We have analyzed the effect of penetration of the electric field into the semiconductor on the electrical and mechanical characteristics of comb-drive actuators. … These effects are relatively small when the gap between the comb-fingers and the substrate is of the order of a micrometer. …

IEEJ Transactions on Sensors and Micromachines 130(8), 388-393, 2010-08-01

J-STAGE CrossRef References (4)
4

Micro Wishbone Interferometer for Miniature FTIR Spectrometer

LEE Young-min , TODA Masaya , ESASHI Masayoshi , ONO Takahito

… Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. …

IEEJ Transactions on Sensors and Micromachines 130(7), 333-334, 2010-07-01

J-STAGE CrossRef References (5)
5

Electrostatic-Comb-Drive 2D Display-Micromirror Operated in Vacuum

CHU Hoang Manh , HANE Kazuhiro

電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会 2010(1), 63-67, 2010-06-17

References (6)
6

Analysis of a Comb-Drive Actuator taking the Surface-State into Consideration [in Japanese]

UEKI Shinji , NISHIMORI Yuki , IMAMOTO Hiroshi , KUBOTA Tomohiro , SUGIYAMA Masakazu , SAMUKAWA Seiji , HASHIGUCHI Gen

電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会 2010(1), 41-44, 2010-06-17

References (6)
7

Potassium Ion Included SiO_2 Electret for Comb Drive Actuator [in Japanese]

SUGIYAMA Tatsuhiko , AOYAMA Michiru , HASHIGUCHI Gen

電気学会研究会資料. PHS, フィジカルセンサ研究会 2010(15), 23-24, 2010-06-17

References (1) Cited by (1)
8

P-2 Potassium Ion Included SiO_2 Electret [in Japanese]

SUGIYAMA Tatsuhiko , Aoyama Michiru , Hashiguchi Gen

… We report a SiO_2 electret for comb-drive actuators that do not need to apply a driving voltage. … This value is sufficient to drive comb actuators. …

Conference on Information, Intelligence and Precision Equipment : IIP 2010, 112-113, 2010-03-16

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9

P-1 Deliberation of TEG(Test Element Group) for MEMS static actuator [in Japanese]

OOISO Hideta , NISHIMORI Yuuki , SUGIYAMA Tatsuhiko , HASHIGUCHI Gen

… This paper describe about deliberation of TEG (Test Element Group) for MEMS (Micro Electro Mechanical Systems) electrostatic actuator. … First TEG is for measuring spring constant by bringing displacement given by comb-drive. …

Conference on Information, Intelligence and Precision Equipment : IIP 2010, 110-111, 2010-03-16

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10

An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism

Yamane Daisuke , Sun Winston , Seita Harunobu , Kawasaki Shigeo , Fujita Hiroyuki , Toshiyoshi Hiroshi

… The electrostatic comb-drive actuators and the mechanically movable coplanar waveguides were implemented on the low-resistive active SOI layer and the high-resistive handle layer, respectively, to effectively allocate the device footprint. … Electrical crosstalk between the waveguide and the electrostatic actuator was suppressed by using the buried silicon dioxide layer. …

IEICE Electronics Express 7(2), 80-85, 2010

J-STAGE CrossRef Cited by (1)
11

A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator

Nishimori Yuuki , Ooiso Hideta , Mochizuki Shunsuke , Fujiwara Nobuyo , Tsuchiya Toshiyuki , Hashiguchi Gen

… We present an equivalent circuit of a comb-drive actuator which takes account of mechanical motion in multiple degrees of freedom (DOF). … A lagrange function of the comb-drive actuator is first set up, and following linearization of the Lagrange’s equation, results in a linear motion matrix. …

Jpn J Appl Phys 48(12), 124504-124504-7, 2009-12-25

The Japan Society of Applied Physics Cited by (1)
12

Development of MEMS Equivalent Circuit Generator [in Japanese]

FUJIWARA Nobuyo , ASAUMI Kazuo , KOIKE Tomoyuki , TSUCHIYA Toshiyuki , HASHIGUCHI Gen

CMOS-MEMS(micro electromechanical system)デバイスの設計効率向上のために「等価回路ジェネレータ」と名づけた設計プラットフォームを開発した.等価回路ジェネレータはMEMSデバイスの等価回路モデル化もとづいている.これにより回路設計技術者は検出回路や駆動回路を含めた回路システム全体での回路シミュレーションを行うことが可能となる.本稿ではMEMSデバイスの機械的, …

Technical report of IEICE. SDM 109(278), 29-32, 2009-11-05

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13

T0302-2-4 Boosting Device by MEMS Oscillator [in Japanese]

SUGIYAMA Tatsuhiko , NISHIMORI Yuki , OOISO Hideta , Aoyama Michiru , Hashiguchi Gen

… The effect of boost of comb-drive actuator was confirmed by SPICE simulation that used the equivalent circuit. …

年次大会講演論文集 : JSME annual meeting 2009(8), 71-72, 2009-09-12

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14

Nanotweezers with Proximity Sensing and Gripping Force Control System

Umemoto Takeshi , Ayano Kenjiro , Suzuki Masato , Yasutake Masatoshi , Konno Takashi , Hashiguchi Gen

… based on an electrostatic comb drive actuator have been developed for the manipulation and interrogation of nanostructures. … These nanotweezers can detect contact with the substrate or sample during approaching or gripping operation by monitoring the resonance state change of the comb drive. …

Jpn J Appl Phys 48(8), 08JB21-08JB21-4, 2009-08-25

The Japan Society of Applied Physics
15

Movable Silicon Mirrors Designed for an MEMS Ring Laser Gyroscope [in Japanese]

MAEYA Junji , HASHIMOTO Taichi , FUJITA Takayuki , MAENAKA Kazusuke

電気学会研究会資料. PHS, フィジカルセンサ研究会 2009(16), 115-118, 2009-07-23

References (4)
16

Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit

FUJIWARA Nobuyo , ASAMI Kazuo , IRIYE Yasuroh , KOIKE Tomoyuki , TSUCHIYA Toshiyuki , HASHIGUCHI Gen

IEEJ Trans. EEE 4(3), 352-357, 2009-05-01

References (3) Cited by (1)
17

Microoptical Interferometer Utilizing Surface-Micromachined Microgratings and Synthetic Heterodyne Technique

Kuo Ju-Nan

… In this paper, I present a synthetic heterodyne microoptical interferometer consisting of a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated comb structure. … The use of the comb drive actuator permits a high-speed movement of the grating, and therefore provides both a wide modulation frequency and a wide frequency response. …

Jpn J Appl Phys 47(9), 7203-7205, 2008-09-25

The Japan Society of Applied Physics
18

OS0405 Mechanical and Piezoresistance Characterization of FIB-CVD Carbon Nanowires for Nano Mechanical Sensors [in Japanese]

Kiuchi Mario , Matsui Shinji , Isono Yoshitada

ナノメカニカルセンサの開発を目指して、MEMSデバイスを用いたアモルファスカーボンナノワイヤ(CNW)の力学的・電気的特性評価を実施した。具体的には、MEMS技術を用いて開発した静電駆動型ナノ材料引張試験デバイスを用いて、FIB-CVD法によって作製した直径約100nmのCNWの機械的性質および弾塑性変形挙動を実験的に解明するとともに、CNWの単軸応力下における電気抵抗特性であるピエゾ抵抗効果につ …

M&M材料力学カンファレンス 2008, "OS0405-1"-"OS0405-2", 2008-09-16

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19

314 Contact Sensing Probe using a Comb-drive Actuator [in Japanese]

Koda Naoko , Ooiso Hideta , Hosogi Maho , Hashiguchi Gen

… We have demonstrated contact sensing using a self-excitation vibration of comb-drive actuator. … Through an immittance analysis of comb-drive actuator using Lagrange's equation, three terminal comb-drive actuator shows maximum propagation admittance at its resonance frequency. …

年次大会講演論文集 : JSME annual meeting 2008(8), 27-28, 2008-08-02

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20

Excitation of lateral vibration and its application using a comb-drive actuator [in Japanese]

OISO Hideta , KODA Naoko , HOSOGI Maho , HASHIGUCHI Gen , NISHIMORI Yuuki

電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会 2008(1), 45-48, 2008-06-12

References (5)

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Search Results: 1-20 of 57

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Search Results:　 1-20 of 57