Search Results:　 1-20 of 230

MITA Makoto , MARUYAMA Satoshi , ATAKA Manabu , TOSHIYOSHI Hiroshi

… An electrostatic micro actuator with an electrical contact between the electrodes is known to show a limit-cycle behavior due to the combination of electrostatic pull-in and release. …

IEEJ Transactions on Sensors and Micromachines 132(7), 189-194, 2012-07-01

J-STAGE CrossRef References (6)

SHINOHARA Keisuke , TAKANA Hidemasa , NISHIYAMA Hideya

混相流 = Japanese journal of multiphase flow 25(5), 495-500, 2012-03-15

References (9)

MARUYAMA Satoshi , NAKADA Muneki , MITA Makoto , TAKAHASHI Takuya , FUJITA Hiroyuki , TOSHIYOSHI Hiroshi

… Both the electrostatic torque and the induction charge models are interpreted by using the equation-defined nonlinear dependent current source on the electrical circuit simulator platform. …

IEEJ Transactions on Sensors and Micromachines 132(1), 1-9, 2012-01-01

J-STAGE CrossRef References (19) Cited by (1)

Ya'akobovitz Assaf , Krylov Slava

… We report on the novel architecture and operational principle of an electrostatically actuated large angle tilting microelectromechanical (MEMS) actuator with kinematic excitation. … The actuator, which is distinguished by the single layer robust architecture and incorporating the simple integrated electrostatic transducer, was fabricated from a silicon-on-insulator (SOI) substrate using a common deep reactive ion etching (DRIE) based process. …

Jpn J Appl Phys 50(11), 117201-117201-8, 2011-11-25

The Japan Society of Applied Physics

Ishida Tadashi , Sato Takaaki , Nabeya Shinsuke , Kakushima Kuniyuki , Fujita Hiroyuki

… The displacements of a tip-moving actuator with and without the nanostructure were measured from TEM images; …

Jpn J Appl Phys 50(7), 077201-077201-5, 2011-07-25

The Japan Society of Applied Physics

ISAMOTO Keiji , TEI Masataka , FUJITA Hiroyuki , TOSHIYOSHI Hiroshi

… We have improved the performance and reliability of an SOI electrostatic MEMS tilt mirror by using a landing island structure in the substrate layer. … It works as a mechanical stopper to suppress the hysteresis due to the electrostatic pull-in and to avoid the electrical short-circuit between the actuator electrodes. …

IEEJ Transactions on Sensors and Micromachines 131(2), 81-87, 2011-02-01

J-STAGE CrossRef References (12) Cited by (1)

UEKI Shinji , NISHIMORI Yuki , IMAMOTO Hiroshi , KUBOTA Tomohiro , SUGIYAMA Masakazu , SAMUKAWA Seiji , HASHIGUCHI Gen

We have analyzed the effect of penetration of the electric field into the semiconductor on the electrical and mechanical characteristics of comb-drive actuators. In this study we found two specific ef …

IEEJ Transactions on Sensors and Micromachines 130(8), 388-393, 2010-08-01

J-STAGE CrossRef References (4)

山本 晃生

科学と工業 84(6), 232-238, 2010-06-00

SHAO Chuan-Yu , KAWAI Yusuke , ESASHI Masayoshi , ONO Takahito

… This letter presents microprobes with an electrostatic actuator to switch the measurement modes between surface imaging mode and mass analysis mode. … Silicon cantilever, extranction electrode and electrosatic actuator with curved electrodes are fabricated on a Prexy glass. … A large displacement of the cantilever can be obtained by the electrostatic actuation. …

IEEJ Transactions on Sensors and Micromachines 130(2), 59-60, 2010-02-01

J-STAGE CrossRef References (4)