Search Results:  1-20 of 412

  • 1

    Electrostatic Resonator for Fatigue Test of PMMA  [in Japanese]

    柴田 駿 , 天谷 諭 , 杉山 進 [他]

    電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 135(7), 257-262, 2015-07

  • 2

    Reliability of potassium ion electret in silicon oxide for vibrational energy harvester applications

    Misawa Kensuke , Sugiyama Tatsuhiko , Hashiguchi Gen , Toshiyoshi Hiroshi

    … A spring-mass system similar to a comb-drive electrostatic actuator is developed by silicon micromachining, and the surface is oxidized by wet-oxidation through a potassium hydroxide bubbler, thereby including potassium atoms at a high concentration. …

    Jpn. J. Appl. Phys. 54(6), 067201, 2015-04-30

    JSAP

  • 3

    Nano powder transportation by combining plasma actuation and electrostatic mixing in a tube

    TAKANA Hidemasa , NAKAKAWAJI Shusaku , UEHARA Satoshi , NISHIYAMA Hideya

    … The well-controlled efficient nano particle transportation is realized by combining plasma actuation, electrostatic force and high oxidation potential of produced ozone in a tube. … Nano particles near the inner electrode wall jump due to electrostatic force, which can suppress particle clogging in a tube. …

    JFST 10(2), JFST0011-JFST0011, 2015

    CrossRef

  • 4

    Electrostatic Resonator for Fatigue Test of PMMA  [in Japanese]

    Shibata Suguru , Amaya Satoshi , Sugiyama Susumu , Ando Taeko

    … Fatigue behavior of polymethyl methacrylate (PMMA) was studied by using polymer electrostatic actuator connected with polymer specimen. … A concentrated force was applied at the notch tip introduced at the side of the specimen when the actuator moved in a circumferential direction. …

    The Journal of the Institute of Electrical Engineers of Japan 135(7), 257-262, 2015

    CrossRef

  • 5

    Micro-Assembly of Electrostatically driven Scanning Force Microscopy Probe using Clip Mechanism

    Kawai Yusuke , Kotani Kyosuke , Shao Chuan-Yu , Ono Takahito

    … A micro-assembly technique for microstructures using a silicon clip mechanism is developed for a time-of-flight scanning force microscope (TOF-SFM) probe with an electrostatically driven actuator. … Electrostatic actuation of the cantilevered microelement is demonstrated. …

    The Journal of the Institute of Electrical Engineers of Japan 135(3), 98-102, 2015

    CrossRef

  • 6

    Principle of Fringe Electric Filed Driven Electrostatic Actuator with Ferroelectric Mover and Comb-shaped Electrodes  [in Japanese]

    TAKAHASHI Tomokazu , Yamada Hiroshi , SUZUKI Masato , AOYAGI Seiji

    … This paper proposes a novel electrostatic actuator driven by fringe electric field generated between comb-shaped electrodes on a substrate of stator. … The mass is laterally moved within the one pitch of the comb-shape electrode thanks to the electrostatic force generated between polarized charge of the tooth and that inside the electrode. … Therefore, the proposed actuator can work at low input voltage. …

    Journal of the Japan Society of Precision Engineering 81(1), 62-67, 2015

    CrossRef

  • 7

    Evaluation on silicon cantilever driven by pn-diode actuator  [in Japanese]

    中井 柚李 , 金谷 和哉 , 谷川 紘 [他]

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 31, 1-5, 2014-10-20

  • 8

    Micro Inertial Driving Actuator with Built-in Position Sensor  [in Japanese]

    松木 薫 , 高橋 雅矢 , 森島 哲矢

    電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 134(6), 140-145, 2014-06

  • 9

    Charging properties of potassium ion SiO2 electret film  [in Japanese]

    HASHIGUCHI Gen , SUGIYAMA Tatsuhiko , SHIBATA Yasushi

    カリウムイオンをシリコン酸化膜の中に混入させ帯電膜とする新しいエレクトレット膜形成方法を開発した。シリコンを水蒸気酸化する際に、キャリアガスで水酸化カリウム水溶液をバブリングして酸化炉内に導入する。酸化後に700℃程度の高温で電圧を印加することで印加した電圧とほぼ等しい帯電膜を得るが、本講演では静電型アクチュエータによる帯電のその場観察と帯電電圧測定、帯電電圧の経時変化などについて報告する。

    Technical report of IEICE. SDM 113(450), 73-76, 2014-02-20

    CiNii Fulltext PDF - Limited 

  • 10

    Charging properties of potassium ion SiO2 electret film  [in Japanese]

    HASHIGUCHI Gen , SUGIYAMA Tatsuhiko , SHIBATA Yasushi

    カリウムイオンをシリコン酸化膜の中に混入させ帯電膜とする新しいエレクトレット膜形成方法を開発した。シリコンを水蒸気酸化する際に、キャリアガスで水酸化カリウム水溶液をバブリングして酸化炉内に導入する。酸化後に700℃程度の高温で電圧を印加することで印加した電圧とほぼ等しい帯電膜を得るが、本講演では静電型アクチュエータによる帯電のその場観察と帯電電圧測定、帯電電圧の経時変化などについて報告する。

    IEICE technical report. Electron devices 113(449), 73-76, 2014-02-20

    CiNii Fulltext PDF - Limited 

  • 11

    Spontaneous Oscillation due to Electrical Charging Effect in MEMS Electrostatic Switches

    Chen Yang-Che , Ishida Tadashi , Toshiyoshi Hiroshi , Chen Rongshun , Fujita Hiroyuki

    … Nanoscopic observation and analysis results suggested that a physical mechanism of the spontaneous oscillation is as follows: (i) Upon a voltage application to the actuator electrodes, the contact tips are mechanically brought into contact as an initial condition. … (iii) The accumulated charges develop an electrostatic attractive force that pulls back the electrode surfaces into contact again, (iv) thereby instantly neutralizing the charges. …

    The Journal of the Institute of Electrical Engineers of Japan 134(11), 338-348, 2014

    CrossRef

  • 12

    Micro Inertial Driving Actuator with Built-in Position Sensor  [in Japanese]

    Matsuki Kaoru , Takahashi Masaya , Morishima Tetsuya

    … The micro inertial drive actuator, which can move two sliders independently, at 2.5 mm in width, 2 mm in height, and 20 mm in length was made as an experiment, and the basic characteristic was evaluated. …

    The Journal of the Institute of Electrical Engineers of Japan 134(6), 140-145, 2014

    CrossRef

  • 13

    Optical-path control by combining silicon waveguide and MEMS actuators : Feasibility of MEMS-tunable microring for wavelength selective switch  [in Japanese]

    HANE Kazuhiro , Chu Hoang Mann

    微小電気機械技術(MEMS)に基づいてシリコン細線導波路波長選択スイッチを提案する.波長可変機能のある広い自由スペクトル領域(FSR)のマイクロリング光フィルタを設計製作した.可変マイクロリング共振器は方向性カプラで結合した二つの固定と可動のU型シリコン導波路により形成されている.可動導波路を低消費電力の静電櫛アクチュエータにより駆動することで,リングの周長が変えられる.リングの中の方向性カプラは …

    Technical report of IEICE. OPE 113(370), 39-44, 2013-12-13

    CiNii Fulltext PDF - Limited 

  • 14

    Nano-Scale Tensile Testing and Sample Preparation Techniques for Silicon Nanowires

    Fujii Tatsuya , Sudoh Koichi , Sakakihara Shouichi , Naito Muneyuki , Inoue Shozo , Namazu Takahiro

    … A reusable on-chip Si device consisting of comb-drive electrostatic actuator for generating tensile force and capacitive sensors for measuring tensile force and displacement was designed and developed for quasi-static tensile test of Si NWs. …

    Jpn J Appl Phys 52(11), 110118-110118-9, 2013-11-25

    JSAP

  • 15

    A 3.3 V operated variable transmission optical attenuator based on subwavelength grating  [in Japanese]

    本間 浩章 , 高橋 一浩 , 石井 仁 [他]

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 30, 1-5, 2013-11-05

  • 16

    DESIGN AND FABRICATION OF A WAVELENGTH-TUNABLE SILICON PHOTONIC MICRO-RING RESONATOR CONSISTING OF OPTICAL WAVEGUIDE COUPLER

    Chu Hoang Manh , Ordoru Mustafa , Kanamori Yoshiaki [他]

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 30, 4p, 2013-11-05

  • 17

    Study of Micro Inertial Driving Actuator with built-in Position Sensor  [in Japanese]

    松木 薫 , 高橋 雅矢 , 森島 哲矢

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 30, 1-4, 2013-11-05

  • 18

    Response time of a silicon photonic waveguide switch using an ultra-small electrostatic comb-drive actuator

    CHU M.H. , ABE S. , MUNEMASA Y. , SASAKI T. , HANE K.

    電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会 2013(1), 15-18, 2013-08-08

    References (5)

  • 19

    Fine Motion Stage with Multilayer Electrostatic Actuator Having the Gaps between Electrode Layers Maintained by Only Lubricating Oil  [in Japanese]

    SATO Kaiji

    電気学会研究会資料. LD, リニアドライブ研究会 2013(1), 11-15, 2013-02-21

    References (5)

  • 20

    High Position Resolution MEMS Fabry-Perot Tunable Filter with Dual Electrodes Electrostatic Actuator  [in Japanese]

    HIROKUBO Nozomu , KOMATSU Hiroshi , HASHIMOTO Nobuaki , SONEHARA Makoto , SATO Toshiro

    … In this paper, we report a MEMS Fabry-Perot tunable filter with Dual Electrodes Electrostatic Actuator (DEEA) which improves the resolution of the mirror gap positioning. …

    The Journal of the Institute of Electrical Engineers of Japan 133(2), 54-55, 2013-02-01

    CrossRef References (4)