Liu Yongxun
,
Guo Ruofeng
,
Kamei Takahiro
,
Matsukawa Takashi
,
Endo Kazuhiko
,
O'uchi Shinichi
,
Tsukada Junichi
,
Yamauchi Hiromi
,
Ishikawa Yuki
,
Hayashida Tetsuro
,
Sakamoto Kunihiro
,
Ogura Atsushi
,
Masahara Meishoku
… The floating-gate (FG)-type metal--oxide--semiconductor (MOS) capacitors with planar (planar-MOS) and three-dimensional (3D) nanosize triangular cross-sectional tunnel areas (3D-MOS) have successfully been fabricated by introducing rapid thermal oxidation (RTO) and postdeposition annealing (PDA), and their electrical characteristics between the control gate (CG) and FG have been systematically compared. …
Jpn J Appl Phys 51(6), 06FF01-06FF01-6, 2012-06-25
The Japan Society of Applied Physics