CiNii Articles - micromachining

1

DPSS Lasers for Micromachining Application [in Japanese]

伊藤博之

ディスプレイ 19(2), 17-24, 2013-02-00
2

Micromachining of graphite for electrode material and application to electric discharge machining [in Japanese]

林諒 , 森田昇 , 山田茂他

砥粒加工学会誌 57(1), 47-52, 2013-01-00
3

Cryogenic Micromachining for Fabrication of Micro Channel on Visco-elastic Polymers [in Japanese]

KAKINUMA Yasuhiro

Journal of the Japan Society of Mechanical Engineers 115(1128), 753-757, 2012-11-05

CiNii Fulltext PDF - Limited
4

Cryogenic Micromachining for Fabrication of Micro Channel on Visco-elastic Polymers [in Japanese]

柿沼康弘

日本機械学会誌 115(1128), 753-757, 2012-11-00
5

Femtosecond Laser Micro- and Nanopatterning of the Fused Silica Tube to Enhance Capillary Effect

Kim Youngseop , Sohn Ik-Bu , Noh Young-Chul

… Femtosecond lasers have considerable advantages over conventional lasers for micromachining of transparent materials, and here we use these advantages to fabricate a new type of glass capillary tube with micro- and nanopatterns on the inner surface of the tube. …

Jpn J Appl Phys 51(10), 102703-102703-4, 2012-10-25

The Japan Society of Applied Physics
6

Development of CAM system for Ultraprecision Micromachining : Process Planning Corresponding to 5-axis Machining of High-aspect-ratio Structure [in Japanese]

小山泰明 , 中本圭一 , 竹内芳美

精密工学会誌 78(10), 912-917, 2012-10-00
7

Fabrication of Functional Surfaces with Micromachining Processes [in Japanese]

諸貫信行

精密工学会誌 78(10), 841-844, 2012-10-00
8

Three-dimensional micromachining inside a glass by single femtosecond laser shot through a glass hologram [in Japanese]

TANAKA Shuhei

應用物理 81(5), 401-405, 2012-05-10

References (12)
9

Micromachining by femtosecond lasers [in Japanese]

FUJITA Masayuki

應用物理 81(5), 380-385, 2012-05-10

References (35)
10

Fabrication of Bonding-Type Hollow Microneedle Array by Injection Molding and Evaluation of its Puncture Characteristics [in Japanese]

OGAI Noriyuki , SUGIMURA Ryo , TAMARU Takuya , TAKIGUCHI Yoshihiro

A microneedle array which consists from small needles compared to a conventional metal injection needle is expected as a low invasive transdermal medical treatment device, and many fabrication approac …

IEEJ Transactions on Sensors and Micromachines 132(5), 133-138, 2012-05-01

J-STAGE CrossRef References (10)
11

Fabrication of Metal Embedded Polymer Periodic Nanostructures by Nanoimprint Process [in Japanese]

OGAI Noriyuki , SUGIMURA Ryo , TAKIGUCHI Yoshihiro

Many nano-application research have been conducted with development of nanoimprint technologies. In particular, metal or metal-polymer hybrid nanostructures have great potentials as nano-devices such …

IEEJ Transactions on Sensors and Micromachines 132(4), 91-95, 2012-04-01

J-STAGE CrossRef References (25)
12

Development of a micromachining system for irradiation with narrow band soft X-ray at high power density and micromachining of silicone rubber [in Japanese]

TORII Shuichi , MAKIMURA Tetsuya , MURAKAMI Kouichi , OKAZAKI Kota , NAKAMURA Daisuke , OKADA Tatsuo , TAKAHASHI Akihiko , NIINO Hiroyuki

電気学会研究会資料. OQD, 光・量子デバイス研究会 2012(1), 5-8, 2012-03-09

References (11)
13

Screening of sperm velocity by fluid mechanical characteristics of a cyclo-olefin polymer microfluidic sperm-sorting device

Matsuura Koji , Takenami Mami , Kuroda Yuka , Hyakutake Toru , Yanase Shinichiro , Naruse Keiji

… By micromachining, two microfluidic channels with different heights and widths (chip A: 0.3 x 0.5 mm; …

Reproductive BioMedicine Online 24(1), 109-115, 2012-01-00

IR CrossRef
14

Fabrication of microneedles by MEMS technologies [in Japanese]

Shikida Mitsuhiro

半導体微細加工技術を応用展開したMEMS (Micro Electro Mechanical Systems) 技術は、大きさ数mm～数μmの微細構造体を作製できることから、圧力、加速度、流量などの物理量を計測するマイクロセンサに用いられている。本稿では、本MEMS技術を医療用マイクロニードルに展開した事例について概説する。具体的には、MEMS加工方法およびそれを用いた医療用マイクロ …

Drug Delivery System 27(3), 176-183, 2012

J-STAGE CrossRef
15

Evaluation Method of Product Development Process with Technology Risk Using Product Worth Flow Analysis

MIWA Toshiharu , AOYAMA Hideki

… The paper shows two case studies in 2 types of micromachining system (lithography technology and cutting technology) developments. …

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 78(785), 312-326, 2012

J-STAGE CrossRef
16

Attempt of making a peeling tool by plating and removal of a plated layer by single discharge (The third report) [in Japanese]

SEKIYA Yuta , SAITOH Kazuhiro , TANABE Rie , ITO Yoshiro , MATSUBARA Hiroshi , LEE Jukyung , MOHRI Naotake , MASUZAWA Takahisa

電気加工学会全国大会講演論文集 2011, 41-42, 2011-11-24

References (6)
17

Electrochemical Micromachining Using Electrostatic induction Feeding Method [in Japanese]

KOYANO Tomohiro , KUNIEDA Masanori

電気加工学会全国大会講演論文集 2011, 1-2, 2011-11-24

References (6) Cited by (1)
18

Electromechanical Properties of Dielectric Electroactive Elastomer Actuators based on Alumina/Natural Rubber

ONTHONG Araya , DATSANAE Sudarat , TANGBORIBOON Nuchnapa

… Dielectric electro active elastomer actuator can be applied for various applications such as micromachining, actuator microflaps for aircraft wings, microscopic valves and pumps, actuators for adaptive optics and steerable catheters, artificial muscles for robotic and prosthetic devices, and adjustable structures for vibration suppression and failure avoidance. …

IEICE technical report. EMD 111(299), 35-38, 2011-11-10

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19

Fabrication of Low-Residual-Stress AlN Thin Films and Their Application to Microgenerators for Vibration Energy Harvesting

Zhang Jinya , Cao Ziping , Kuwano Hiroki

… Among them, AlN thin films deposited on the substrate with the Al bottom electrode demonstrated not only low residual stress but also high enough $c$-axis orientation, and thus they were utilized to fabricate microgenerators by the micromachining process for converting environmental vibration energy into electric energy. …

Jpn J Appl Phys 50(9), 09ND18-09ND18-4, 2011-09-25

The Japan Society of Applied Physics
20

Development of Fabrication Process for Large-Displacement Polymer MEMS with Stacked Movable Structures Based on Hot Embossing and Polishing [in Japanese]

AMAYA Satoshi , DAO Viet Dzung , SUGIYAMA Susumu

本論文では，ホットエンボスと研磨加工を用いたポリマーMEMSデバイス製作プロセスの開発について報告する。開発した製作プロセスは，まず2段構造のSi型を製作し，デバイス構造をホットエンボスにより成形した。その後，成形した試料と基板となるPMMA板とを表面活性化法により接合した。接合後の試料上面には，ホットエンボス後に残る残膜があり，これを研磨加工によって除去した。最後に，デバイス表面にAuをスパッタ …

Journal of Japan Institute of Electronics Packaging 14(6), 507-512, 2011-09-01

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