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Ab initio Molecular Orbital Study of Water Absorption and Hydrolysis of Chemical Vapor Deposited SiOF Films I
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NAKASAKI Yasushi
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MIYAJIMA Hideshi
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KATSUMATA Ryota
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HAYASAKA Nobuo
… Si atoms linked with multiple F atoms become more reactive with H_2O by reducing the activation barrier of the -OH coordination to Si, and with OH^- by increasing the stabilization energy of the pentacoordinated-Si formation. …
Japanese journal of applied physics. Pt. 1, Regular papers & short notes 36(4B), 2533-2544, 1997-04-30
CiNii Fulltext PDF - Paid
The Japan Society of Applied Physics
References (46)