ターボ分子ポンプ自身のガス放出の定量評価　第１報　理論的検討

• 尾高 憲二

  (株) 日立製作所機械研究所

書誌事項

タイトル別名

• Quantitative Evaluation of Outgassing from Turbomolecular Pumps. (1)-Theoretical Analysis.
• ターボ ブンシ ポンプ ジシン ノ ガス ホウシュツ ノ テイリョウ ヒョウカ
• (1) -Theoretical Analysis
• 第1報 理論的検討

抄録

The influence of outgassing from a turbomolecular pump (TMP) on the pumping speed was investigated theoretical-ly. The investigation was based on a combination of the transmission probabilities of the gas through blade rows with outgassing from every part of the TMP. A new formulation was derived for evaluating pressure from the intrinsic pumping speed and the outgassing rate of the TMP. This formulation clarified the physical meaning of the conventional pumping speed. Several of the principal quantities used in conventional methods of pumping speed evaluation can be used with the new formulation. A method was also developed for measuring outgassing rate of TMP. This method enables quantitative evaluation of the influence of materials, surface treatments, and configurations of TMP on the pumping speed. The high accuracy of pressure evaluation by the new method facilitated the selection of the appropriate size of pump for a vacuum system.

収録刊行物

• 真空

  真空 39 (10), 488-496, 1996

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040382336
• NII論文ID: 10001951975
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.39.488
• ISSN: 18809413
• ISSN: 05598516
• ISSN: http://id.crossref.org/issn/05598516
• NDL書誌ID: 4077254
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4077254
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可