形状記憶合金駆動素子を用いた大口径コンパクトゲートバルブ

  • 西川 雅弘
    大阪大学工学研究科電子情報エネルギー工学専攻
  • 吉川 和博
    株式会社フジキン大阪ハイテック研究所

書誌事項

タイトル別名
  • The Compact Large Gate Valve using a Shape Memory Alloy Driving Element.
  • ケイジョウ キオク ゴウキン クドウ ソシ オ モチイタ ダイコウケイ コンパ

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抄録

The compact large gate valve has been newly devised using a reversible SMA driving element. The vacuum boundary is set by the aluminum sheet, which is rolled around two cylinders, one of which is located on either side of the valve. When the SMA driver is heated, the SMA shrinks through the inverse martensitic transformation and the sheet retainer rises and fastens the aluminum sheet. When the SMA driver is cooled, the SMA re-expands to the original shape and releases the aluminum sheet.<BR>This conceptual valve is designed and proven for compactness for use with all metal structures. The fundamental performance characteristics of the SMA gate valve are investigated to obtain good vacuum sealing.

収録刊行物

  • 真空

    真空 40 (8), 643-649, 1997

    一般社団法人 日本真空学会

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