タンデム運転によるターボ分子ポンプ自身のガス放出量変化の定量評価

• 尾高 憲二

  (株) 日立製作所機械研究所

書誌事項

タイトル別名

• Quantitative Evaluation of the Change in Outgassing from a Turbomolecular Pump in the Case of Tandem Operation.
• タンデム ウンテン ニヨル ターボ ブンシ ポンプ ジシン ノ ガス ホウシュ

抄録

Outgassing rates from a turbomolecular pump (TMP) were measured for two different roughing pump systems, a rotary pump (RP) and a combination of another TMP and the rotary pump (tandem operation). The TMP tested was a TPU 170 (Balzers) with a nominal pumping speed of 0.17 m³s^-1 for N₂. Before baking, no difference was found in the outgassing rates from the TMP for the two roughing pump systems. In an ultimate pressure region after baking, the out-gassing rate was 2.1 × 10^-9 Pa·m³s^-1 with the RP and 8.2 × 10^-10 Pa·m³s^-1 in tandem operation. The outgassing rate originating from the TMP parts and the amount of gas passing through the TMP from an outlet to an inlet were evaluat-ed to be 8.2 × 10^-10 Pa·m³s^-1 and 1.3 × 10^-9 Pa·m³s^-1, respectively. On comparing these results with those of another type of TMP, it was found that the outgassing rate from a TMP is useful for the analytical evaluation of the effects of materials, surface treatments and configurations of a TMP on its performance.

収録刊行物

• 真空

  真空 40 (10), 761-766, 1997

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040780928
• NII論文ID: 10001959277
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.40.761
• ISSN: 18809413
• ISSN: 05598516
• ISSN: http://id.crossref.org/issn/05598516
• NDL書誌ID: 4333662
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4333662
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可