真空中絶縁破壊と銅電極の表面現象に関する研究

• 岩井 明信

  埼玉大学工学部電気電子システム工学科

• 小林 信一

  埼玉大学工学部電気電子システム工学科

• 斉藤 芳男

  高エネルギー加速器研究機構

書誌事項

タイトル別名

• Charges in Copper Electrode Surface Conditions Caused by Breakdowns in Ultra-high Vacuum.
• シンクウチュウ ゼツエン ハカイ ト ドウ デンキョク ノ ヒョウメン ゲンシ

抄録

Influence of Cu electrode surface conditions, such as chemical composition and crystal structure of surface, on electrical breakdown in vacuum has been investigated. The chemical compositions were analyzed by a X-ray photoelectron spectroscopy (XPS) and the crystal structure was quantified by measuring residual stresses. The XPS analysis revealed that electrode surfaces were completely cleaned by repetitive breakdowns. The values of the residual stress varied significantly after 500 breakdowns. From breakdown current voltage waveforms, it was demonstrated that breakdown mechanism might be altered by repetitive breakdowns. The mechanism of breakdowns has been discussed on the basis of field electron emission caused by not only metallic but non metallic mechanism.

収録刊行物

• 真空

  真空 41 (3), 227-230, 1998

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040214912
• NII論文ID: 10001959867
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.41.227
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 4469618
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4469618
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可