マンガン亜鉛フェライト膜の作製および磁気特性 Preparation of Manganese Zinc Ferrite Films and their Magnetic Properties
Mnl.xZnxFe<SUB>2</SUB>O<SUB>4</SUB> (0≤X≤1) films were prepared by using a dual source evaporation apparatus added with an r.f.generator of 13.56MHz. When as-deposited films were annealed in a reduced atmosphere at 900°C for 5 hours, spinel-type ferrite films with single phase were formed. The films were crystal-oriented to <110> direction of the spinel structure. Mn<SUB>0.7</SUB>Zn<SUB>0.3</SUB>Fe<SUB>2</SUB>O<SUB>4</SUB> film had the value of saturation magnetization of 485 emu/cc (0.61 Wb/m<SUB>2</SUB>), coercive force of 30 Oe (2.4 kA/m) and initial permeability of 550 respectively. The μ-T curve of the Mn<SUB>0.7</SUB>Zn<SUB>0.3</SUB>Fe<SUB>2</SUB>O<SUB>4</SUB> film was appreciably different from that of the bulk Mn-Zn ferrite, because it was a solid solution composed of Mn-Zn ferrite and magnetite.
粉体および粉末冶金 43(1), 41-45, 1996-01-15
Japan Society of Powder and Powder Metallurgy