磁性材料の化学　プラズマフリー・スパッタ法で作製したＣｏ‐Ｚｎフェライト膜の結晶性と磁気特性

• 野間 賢二

  東京工業大学工学部電子物理工学科

• 松下 伸広

  東京工業大学工学部電子物理工学科

• 中川 茂樹

  東京工業大学工学部電子物理工学科

• 直江 正彦

  東京工業大学工学部電子物理工学科

書誌事項

タイトル別名

• Crystallographic and Magnetic Characteristics of Co-Zn Ferrite Films Deposited by Plasma-free Sputtering Method.
• プラズマ フリー スパッタホウ デ サクセイシタ Co Zn フェライト マク

抄録

Co-Zn ferrite films were expected for high density magnetic recording media and magnetic thin film devices because of its large magnetocrystalline anisotropy energy and high coercivity. Facing Targets Sputtering (FTS) method was used to deposit Co-Zn ferrite films and the films composed of well (111) oriented crystallites were attained at the substrate temperature T₂ below 100°C by using sintered targets with the composition of Co_0.51Zn_0.45Fe_2.04O_y The maximum value of saturation magnetization 4πM_s of 4.8 kG was attained at T_s of 250°C and the in-plane and perpendicular coercivities, H_c// and H_c⊥ were around 1.8 kOe, respectively. It was also found that the preferred orientation of Co-Zn ferrite crystallites were strongly dependent on T_s.

収録刊行物

• 粉体および粉末冶金

  粉体および粉末冶金 43 (1), 46-51, 1996

  一般社団法人 粉体粉末冶金協会

キーワード

• Co-Zn ferrite
• Facing Targets Sputtering
• magnetic recording media
• low substrate temperature
• well (111) orientation

詳細情報

• CRID: 1390001206309363968
• NII論文ID: 10002011033
• NII書誌ID: AN00222724
• DOI: 10.2497/jjspm.43.46
• ISSN: 18809014
• ISSN: 05328799
• NDL書誌ID: 3918033
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3918033
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可