イオン注入法による窒化鉄の生成 Preparation of Iron Nitride with Ion Implantation
Formation of iron nitrides, especially Fe<SUB>16</SUB>N<SUB>2</SUB>, was investigated by nitrogen ion implantation for α-Fe sheet. The implanted nitrogen was lost during the process in the high energy implantation because of the thermal instability of iron nitrides. N<SUB>+</SUB> ion implantation with a beam voltage of less than 100keV and its current of less than 5μA was effective for the Fe<SUB>16</SUB>N<SUB>2</SUB> formation. Successive annealing in vacuum at 100°C improved its crystallinity. The formation was explicitly detected by XRD for thin film with an incident beam angle of 1 degree. It was also observed on the N<SUB>+</SUB> ion implantated α-Fe(211) preferred oriented thin film with a thickness of about 1μm deposited on capton film by rf-sputter deposition. The presence of Fe<SUB>16</SUB>N<SUB>2</SUB> was detected by XRD, but Mossbauer spectroscopy did not show clearly its presence in the as implanted product. Further annealing is necessary to obtain a well crystallized Fe<SUB>16</SUB>N<SUB>2</SUB>.
粉体および粉末冶金 43(1), 95-100, 1996-01-15
Japan Society of Powder and Powder Metallurgy