プラズマ窒化における水素の挙動と役割 Behavior and Role of Hydrogen during Plasma Nitriding
The effect of the gas composition in N<SUB>2</SUB>-H<SUB>2</SUB>, gas mixture plasma on the growth rate of titanium nitride layers was investigated by optical emission spectroscopy (OES), microscopic observation, and X-ray diffractometry. The growth rate of nitride layers was enhanced by hydrogen addition, which was the highest at 50vol.%N<SUB>2</SUB>-50vol.%H<SUB>2</SUB>. The results of the spectroscopic measurements and microscopic observations indicate that NH radical intensity is correlated with the growth rate of nitride layers. It is suggested that NH radical plays the most significant role during nitriding process. XRD analysis shows that the compound layers consists of TiN and Ti<SUB>2</SUB>N. In the diffusion layers, acicular textures were observed by microscopic observation.
粉体および粉末冶金 44(7), 712-715, 1997-07-15
Japan Society of Powder and Powder Metallurgy