尿素 -前駆体を用いた窒化アルミニウムの合成 [in Japanese] Synthesis of Aluminium Nitride using Urea-Precursor [in Japanese]
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We newly synthesized AlN using urea and aluminium chloride as the starting materials. By directly introducing aluminium chloride into a melted urea at 135°C, urea-precursor was formed under a non-aqueous condition and then no γ-Al<SUB>2</SUB>O<SUB>3</SUB> was observed in any calcination steps. As a result, well-crystalline AlN powder was obtained by the pyrolysis of urea-precursor above 900°C under a stream of N<SUB>2</SUB> gas for lhour, In this process the urea-precursor decomposed above 350°C, and the formation of AlN skeleton with a layer structure occurred above 800°C. The total yield of AlN powder based on the Al atom was only 80% due to production of volatile Al(NH<SUB>3</SUB>)<SUB>6</SUB>AlH<SUB>4</SUB>C<SUB>12</SUB> as a by-product. The AlN powder was characterized by X-ray diffraction, infrared spectroscopy and scanning electron microscopy (SEM). Morphological observation of the AlN powder by mean of SEM revealed large particles of about 30-μm diameter, which consisted of ultrafine particles of less than 1-μm diameter. In our report we also discuss the preparation and decomposition processes of urea-precursor for the synthesis of AlN.
- J. Jpn. Soc. Powder Powder Metallurgy
J. Jpn. Soc. Powder Powder Metallurgy 45(1), 31-35, 1998-01-15
Japan Society of Powder and Powder Metallurgy