バリウムフェライト垂直磁気異方性膜に及ぼすAlN下地膜の効果 Effect of AlN Underlayer on Barium Ferrite Thin Films with Perpendicular Magnetic Anisotropy

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Barium ferrite films were prepared by r.f. diode sputtering on AlN underlayers, and their crystal orientation and magnetic properties were investigated. The AlN underlayers, well oriented in c-axis, with the thickness of around 3000-5000Å were deposited at room temperature. On that AlN underlayer with the thickness of 5000Å, the barium ferrite films were deposited. As the deposited barium ferrite films were not crystallized, they were post-annealed at the temperatures between 600°C and 900°C for 18 ks in air. When the film was annealed at 650°C or more, the hexagonal crystalline of barium ferrite was improved and its [001] axis slightly lying perpendicular to the film surface was recognized. The superior orientation of [001] axis may be presumed to be caused by the effect of AlN underlayer. However, its orientation was not perfectly uniaxial, because of the use of incomplete crystalline AlN underlayers. On the other hand, perpendicular magnetic anisotropy of the barium ferrite films deposited on the AlN underlayers was enhanced, owing to the effect of the underlayers.

収録刊行物

  • 粉体および粉末冶金  

    粉体および粉末冶金 45(1), 82-85, 1998-01-15 

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10002014962
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    4392670
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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