水蒸気濃度の異なる窒素水素混合ガス雰囲気中で焼成したケイ素粉末成形体の組織と結晶 Effect of Water Vapor Content in a N_2/H_2 firing Atmosphere on the Micro Structure of fired Silicon Powder Compact

この論文にアクセスする

この論文をさがす

著者

抄録

The objective of this work is to investigate the effect of water vapor content in a mixed gas consisting of nitrogen and hydrogen for firing atmosphere on the micro structure and crystal phase of fired silicon powder compact. In consequence of the firing test, crystal of α-silicon nitride, α-cristobalite and α-quartz were formed in order as water vapor content grows higher and fibrous or network shaped micro structures were formed in all range. From XRD and SEM observations of the fired specimens and from phase diagram of Si-SiO<SUB>2</SUB> system, the following mechanism of silicon oxide formation was suggested. At the time of the firing, first melted layer consisting of silicon and oxigen was formed on the surface of the specimen. Secondly an oxigen content of the melted layer increased further. Lastly an amorphous silicon oxide precipitated from there. By keeping on the specimen at the firing temperature, precipitation of amorphous silicon oxide and dissolution of silicon and oxigen proceeded concurrently in the melted layer. Finally silicon was completly transformed into silicon oxide.

収録刊行物

  • 粉体および粉末冶金  

    粉体および粉末冶金 45(5), 449-452, 1998-05-15 

    Japan Society of Powder and Powder Metallurgy

参考文献:  6件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10002015603
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    4481801
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ