高感度感温磁性薄膜デバイスの作製と特性評価 Preparation and Characterization of High Sensitive Temperature-sensitive Magnetic Thin Film Device
Up to now, the both of bulk and thick film as a temperature-sensitive substance have been provided. However, the sensitivity of these substances with a large heat capacity are low level for minute temperature detection. The development of a thin film following the tendency of a miniaturization and lightweight of an electronic system has been required. Present authors investigated a method of fabricating temperature-sensitive magnetic thin-film device (TMT) via an annealing treatment after the sputtering of a temperature-sensitive ferrite with low Curie temperature as a target. The method has two step profile: after depositing metal components of a temperature-sensitive ferrite on the substrate by sputtering, a high temperature annealing treatment is performed pouring argon gas, as result a ferrite thin film (thickness: 1.5μm) with spinel structure can be prepared. TMT reproduced faithfully a component of a temperature-sensitive ferrite has the remarkable temperature dependence and a small heat capacity, so responds sharply to a minute temperature variation. Therefore, TMT is expected to be applied to a pyro-magnetic sensor, a biosensor as well as an enzyme sensor.
粉体および粉末冶金 45(8), 727-732, 1998-08-15
Japan Society of Powder and Powder Metallurgy