Preparation and Characterization of High Sensitive Temperature-sensitive Magnetic Thin Film Device.
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- Ajishi Yoshifumi
- Faculty of Engineering, Iwate Univ
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- Yachi Yoshimitsu
- Faculty of Engineering, Iwate Univ
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- Chiba Shigeki
- Faculty of Engineering, Iwate Univ
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- Osada Hiroshi
- Faculty of Engineering, Iwate Univ
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- Seki Kyoshiro
- Faculty of Engineering, Iwate Univ
Bibliographic Information
- Other Title
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- 高感度感温磁性薄膜デバイスの作製と特性評価
- コウカンド カンオン ジセイ ハクマク デバイス ノ サクセイ ト トクセイ
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Abstract
Up to now, the both of bulk and thick film as a temperature-sensitive substance have been provided. However, the sensitivity of these substances with a large heat capacity are low level for minute temperature detection. The development of a thin film following the tendency of a miniaturization and lightweight of an electronic system has been required. Present authors investigated a method of fabricating temperature-sensitive magnetic thin-film device (TMT) via an annealing treatment after the sputtering of a temperature-sensitive ferrite with low Curie temperature as a target. The method has two step profile: after depositing metal components of a temperature-sensitive ferrite on the substrate by sputtering, a high temperature annealing treatment is performed pouring argon gas, as result a ferrite thin film (thickness: 1.5μm) with spinel structure can be prepared. TMT reproduced faithfully a component of a temperature-sensitive ferrite has the remarkable temperature dependence and a small heat capacity, so responds sharply to a minute temperature variation. Therefore, TMT is expected to be applied to a pyro-magnetic sensor, a biosensor as well as an enzyme sensor.
Journal
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- Journal of the Japan Society of Powder and Powder Metallurgy
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Journal of the Japan Society of Powder and Powder Metallurgy 45 (8), 727-732, 1998
Japan Society of Powder and Powder Metallurgy
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Keywords
Details 詳細情報について
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- CRID
- 1390001206308354304
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- NII Article ID
- 10002052557
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- NII Book ID
- AN00222724
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- COI
- 1:CAS:528:DyaK1cXmtFGjtrk%3D
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- ISSN
- 18809014
- 05328799
- http://id.crossref.org/issn/05328799
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- NDL BIB ID
- 4540063
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed