ガラス及びサファイアへのイオン注入による酸化物微粒子の生成 Synthesis of Oxide Fine Particles Induced by Ion Implantation into Glass and Sapphire

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Using double ion species implantation of metal and oxygen ions, we have examined the possibility of synthesis of metal-oxide fine particles in glass or sapphire surface. Characteristics of ion implanted silica glass and sapphire were examined by RBS, XRD and optical (absorption and photo-luminescence) measurements. 1.8 MeV 1×10<SUP>17</SUP> Cu<SUP>+</SUP>/cm<SUP>2</SUP> implantation into silica glass and a successive heat treatment of 1000°, 1h in the air can make Cu fine particles. 1.8 MeV 1×10<SUP>17</SUP> Cu<SUP>+</SUP>/cm<SUP>2</SUP> and 1.0 MeV 1×10<SUP>17</SUP> O<SUP>+</SUP>/cm<SUP>2</SUP> implantation into silica glass and the successive heat treatment can synthesis Cu<SUB>2</SUB>O fine particles of about 8 nm in radius. 1.8 MeV 5×10<SUP>16</SUP> Ti<SUP>+</SUP>/cm<SUP>2</SUP> and 1.0 MeV 1×10<SUP>17</SUP> O<SUP>+</SUP>/cm<SUP>2</SUP> into sapphire and the successive heat treatment can synthesis Ti0<SUB>2</SUB> fine particles of about 10 nm in radius. The TiO<SUB>2</SUB> particles were rutile-type with (200) orientation, which may be related to the (0001) orientation of sapphire substrate. Luminescence from defects in sapphire substrate was observed, but luminescence from the particles could not be detected.

収録刊行物

  • 粉体および粉末冶金

    粉体および粉末冶金 45(12), 1216-1219, 1998-12-15

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10002053538
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    4629462
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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