金属表面層の直接サーメット化とイオン注入用粉粒状試料保持器 Transformation of Metal Surface to Cermet by Plasma Processing and Powder/Granular Material Holder for Ion Implantation

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This experimental study is concerned with the fabrication of "cermets" at a sub-surface layer of metal by reactive plasma processing at high temperatures. Samples of Ti and Zr were carbonized or nitrided with use of CH<SUB>4</SUB> gas or a gas mixture of N<SUB>2</SUB> and H<SUB>2</SUB>, respectively. Experiments were done below 1300°C for less than 3h. Thickness and hardness of modified layers were increased with the modifying time and temperature, especially, at temperature over 900°C. The maximum Vicker's hardness of TiC based cermet was about 5000Hv (kg/mm<SUP>2</SUP>) and the maximum thickness of ZrN reached about 50μm for only 2h, both at 1300°C. For the next step aiming to decrease the activation energy of atomic diffusion and the modifying temperature, the effects of pre-irradiation processing before the main processing were reviewed for the nitriding of pure aluminium. In addition, relating to the application of ion implantation to the fabrication of cermets by sintering, "a powder/granular material holder" was newly designed.

収録刊行物

  • 粉体および粉末冶金  

    粉体および粉末冶金 45(12), 1220-1223, 1998-12-15 

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10002053548
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    4629463
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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