Transformation of Metal Surface to Cermet by Plasma Processing and Powder/Granular Material Holder for Ion Implantation.

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  • 金属表面層の直接サーメット化とイオン注入用粉粒状試料保持器
  • キンゾク ヒョウメンソウ ノ チョクセツ サーメットカ ト イオン チュウニュ

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Abstract

This experimental study is concerned with the fabrication of "cermets" at a sub-surface layer of metal by reactive plasma processing at high temperatures. Samples of Ti and Zr were carbonized or nitrided with use of CH4 gas or a gas mixture of N2 and H2, respectively. Experiments were done below 1300°C for less than 3h. Thickness and hardness of modified layers were increased with the modifying time and temperature, especially, at temperature over 900°C. The maximum Vicker's hardness of TiC based cermet was about 5000Hv (kg/mm2) and the maximum thickness of ZrN reached about 50μm for only 2h, both at 1300°C. For the next step aiming to decrease the activation energy of atomic diffusion and the modifying temperature, the effects of pre-irradiation processing before the main processing were reviewed for the nitriding of pure aluminium. In addition, relating to the application of ion implantation to the fabrication of cermets by sintering, "a powder/granular material holder" was newly designed.

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