電析法による高比抵抗Ni-Fe系軟磁性薄膜の作製 Electrodeposition of Soft Magnetic Ni-Fe-based Film with High Resistivity
We attempted to increase resistivity (ρ) while maintaing good soft magnetic properties by using industrial-grade permalloy (Ni<sub>80</sub>Fe<sub>20</sub>) as a core material. We added diethylenetriamine (DET) as an organic additive to NiFe bath to increase resistivity. The adding of 3∼4ppm of DET produced a film with resistivity three times resistivity as high as Ni<sub>80</sub>Fe<sub>20</sub>, and the higher resistivity film retained the good soft magnetic properties due to the codeposition of small amounts of carbon and sulfur. Increased resistivity was caused because the resulting microstructure contained more minute crystal grains than the conventional microstructure. The higher resistivity NiFe film exhibits higher permeability than that of conventional Ni<sub>80</sub>Fe<sub>20</sub> film above 30MHz because eddy current loss is suppresed.
- 表面技術 = The Journal of the Surface Finishing Society of Japan
表面技術 = The Journal of the Surface Finishing Society of Japan 49(3), 292-296, 1998-03-01
The Surface Finishing Society of Japan