TEM and ESCA Observations of Copper Deposits Containing Tin Impurities.

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  • Ｓｎ不純物を含む銅電析皮膜のＴＥＭならびにＥＳＣＡ観察
  • Sn フジュンブツ オ フクム ドウ デンセキ ヒマク ノ TEM ナラビニ

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Abstract

TEM and ESCA observations have been used to study copper crystallite sizes, tin and oxygen atom concentration distributions, tin oxidation, and the crystal structure of tin oxide, compared to electrolytic polycrystalline copper deposits with no impurity atoms (pure copper deposits). The 0.003wt%Sn-Cu alloy deposited in a copper electrolyte containing a tin additive of 1g/dm3 showed almost the same results as the pure copper deposit. For the 1.10wt%Sn-Cu alloy produced in an electrolyte containing a tin additive of 10g/dm3, tin atoms were found to be incorporated into copper deposits in both metallic and oxidation states. Tin oxide particles (SnO2) having a rutile (or C4) tetragonal structure were observed to be a smooth and elliptical, 2-5nm in size, and almost homogeneously dispersed as clusters of several particles inside copper deposits.<br>We also sound in nm-order SnO2 particle incorporation that particles form in the copper electrolyte and are concomitantly introduced into copper deposits during alloy electrodeposition.

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