Application of Gases to Surface Finishing Technologies. Dry Etching and Its Gas Chemistry.

• TSUKADA Tsutomu

  ANELVA Corp.

Bibliographic Information

Other Title

• ガスと表面処理　　ドライエッチングとガス
• ドライ エッチング ト ガス

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 49 (6), 552-558, 1998

  The Surface Finishing Society of Japan

Keywords

• Reactive Gas
• Dry Etching
• Reactive Ion Etching
• Plasma
• Fluorocarbon Gas

Details

• CRID: 1390001204113643648
• NII Article ID: 10002109394
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.49.552
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 4502318
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4502318
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles