Abrasive Processing and Polishing Technology. Tribology in Polishing Technology.

• UMEHARA Noritsugu

  Graduate School of Eng., Tohoku Univ.

Bibliographic Information

Other Title

• 砥粒研磨技術　　研磨技術とトライボロジー
• ケンマ ギジュツ ト トライボロジー

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 49 (9), 922-927, 1998

  The Surface Finishing Society of Japan

Keywords

• Tribology
• Polishing
• Mechanical Polishing
• CMP

Details

• CRID: 1390001204115666048
• NII Article ID: 10002110398
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.49.922
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 4557736
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4557736
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles