電子シャワー法によるFe_4N膜の作製および鉄の窒化 [in Japanese] Fe_4N Thin Films and Nitriding of Iron Films Prepared by Electron Shower [in Japanese]
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Due to high Fe<sub>4</sub>N chemical stability, wear resistance, and <i>B</i><sub>s</sub> (saturation magnetic flux density), it shows promise as a magnetic recording medium. The many types of iron nitride, and their properties depend on their preparation. Iron nitrides were prepared by new PVD: electron shower. Nitriding increased with N<sub>2</sub> gas pressure, and the Fe<sub>4</sub>N single phase was obtained at <i>P</i><sub>N2</sub>=7×10<sup>-3</sup> Torr. <i>B</i><sub>s</sub> was high……1.1T, but <i>H</i><sub>c</sub> (coercive force) low……30Oe.<br>To increase <i>H</i><sub>c</sub> due to shape anisotropy, Fe film was prepared by oblique evaporation, and nitrided by electron shower bombardment in <i>P</i><sub>N2</sub>=0.01Torr for 420s. The iron film changed to iron nitride film (Fe<sub>4</sub>N+Fe<sub>2-3</sub>N), <i>B</i><sub>s</sub> was 0.75T and <i>H</i><sub>c</sub> was 500Oe. Which made the film applicable in magnetic recording media.
- Jitsumu Hyomen Gijutsu
Jitsumu Hyomen Gijutsu 49(10), 1095-1099, 1998-10-01
The Surface Finishing Society of Japan