ＡＩＰ法により作製したＴｉＮ，ＣｒＮ，Ｃｒ２ＮおよびＡｌＴｉＮ膜の熱膨張率および二軸弾性率の温度依存性

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  • Temperature Dependence of Thermal Expansion Coefficient and Bi-axial Modulus of arc-ion Plated Tin, Crn, Cr2N and AlTin coations.
  • AIPホウ ニ ヨリ サクセイ シタ TiN CrN Cr2N オヨビ AlTiN マク ノ ネツ ボウチョウリツ オヨビ 2ジク ダンセイリツ ノ オンド イソンセイ

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The temperature dependence of metal nitride thermal stress was measured up to 500°C using a high-temperature thin film stress system (Tencor F2400), and primary results for TiN, CrN, Cr2N, and AlTiN were presented. A series of metal nitrides-TiN, CrN, Cr2N and AlTiN -were deposited by cathodic arc-ion plating onto Ti-6Al-4V and SUS304 substrate. The temperature dependence of the thermal expansion coefficient and the bi-axial modulus of these coatings were calculated from the temperature-stress relationship for coating deposited onto substrates having different thermal expansion coefficients. Results showed that thermal expansion coefficients of these coatings were monotonically increased as temperature increased up to about 500°C. Of these, Cr2N and AlTiN are largest at about 9.5×10-6/°C at room temperature. The biaxial modulus showed slight temperature dependence for all coatings, but different for each coating. The room-temperature biaxial moduluses of TiN, CrN, Cr2N, and AlTiN are 420, 320, 290 and 500GPa. Using there results, the stress-temperature relationship of TiN, CrN, and Cr2N which were deposited onto SKD61 and Ti-6Al-4V substrate were calculated.

収録刊行物

  • 表面技術

    表面技術 50 (1), 52-57, 1999

    一般社団法人 表面技術協会

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