ダイヤモンド膜の耐摩耗性に及ぼす圧縮応力の効果 Effect of Compressive Stress on Diamond Film Wear Resistance

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We studied the effect of compressive stress on the wear resistance of polycrystalline diamond films synthesized by hot-filament chemical vapor deposition (CVD) method using ethanol as the precursor. Samples were (a) a film coated onto a tungsten carbide substrate to give the highest compressive stress to the film, (b)∼(d) films brazed onto tungsten carbide substrates, and (e) a film glued onto a tungsten carbide substrate to make the film almost stress-free. Compressive stress in the film sample was measured by X-ray diffraction and found to range from -300 to -1500MPa depend on the sample. Films then were subjected to a wear test involving application of a rotating diamond wheel to the film surface. Results showed that the higher the compressive stress in the film, the greater the wear resistance. Film having an absolute compressive stress of ≥1000MPa, for example, showed wear resistance about three times higher than that of a stress-free diamond film or sintered diamond.

収録刊行物

  • 表面技術 = The Journal of the Surface Finishing Society of Japan  

    表面技術 = The Journal of the Surface Finishing Society of Japan 50(4), 341-346, 1999-04-01 

    The Surface Finishing Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002112152
  • NII書誌ID(NCID)
    AN1005202X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09151869
  • NDL 記事登録ID
    4707844
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-291
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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