Possibility of Microfabrication and Atomic Layer Etching Controlled by X-ray Excited Processes
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- TERAKADO Shingo
- SANYO Tsukuba Research Center
Bibliographic Information
- Other Title
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- X線による微細加工と原子層エッチングの可能性
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Journal
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- 表面科学
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表面科学 16 (6), 360-366, 1995-06-10
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Details 詳細情報について
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- CRID
- 1571135649067386752
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- NII Article ID
- 10002115705
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- NII Book ID
- AN00334149
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- ISSN
- 03885321
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- Text Lang
- ja
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- Data Source
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- CiNii Articles