Spherical Aberration and Beam Shape Simulation of Scanning X-ray Source for X-ray Photoelectron Spectroscopy

• IWAI Hideo

  ULVAC-PHI, INC.

• OIWA Retsu

  ULVAC-PHI, INC.

• LARSON Paul E.

  PHYSICAL ELECTRONICS INC.

• KUDO Masahiro

  Department of Applied Physics, Faculty of Engineering, Seikei University

Bibliographic Information

Other Title

• X線光電子分光法用走査型X線源の球面収差とビーム形状シミュレーション

Journal

• 表面科学

  表面科学 16 (9), 592-597, 1995-09-10

Details

• CRID: 1571417124044102272
• NII Article ID: 10002116371
• NII Book ID: AN00334149
• ISSN: 03885321
• Text Lang: ja
• Data Source:
  • CiNii Articles