Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

• OGIWARA, Toshiya

• TANUMA, Shigeo

キーワード

• argon ion sputtering
• InP/GaInAsP multilayer specimens
• Auger depth profiling analysis

詳細情報

• CRID: 1050579156081992960
• NII論文ID: 10002116701
• NII書誌ID: AN00334149
• Web Site: https://mdr.nims.go.jp/pid/d2f4d5f9-4d9d-4bcc-9ac9-c1f834e6005f
• 資料種別: journal article
• データソース種別:
  • IRDB
  • CiNii Articles