Improvements of the Accuracy of Depth Profiling in Secondary Ion Mass Spectrometry (SIMS) by using a Mini-Projection Technique
-
- SUMIYA Hiroyuki
- Hitachi Instruments Engineering Co. Ltd.
-
- MUTO Katsumi
- Hitachi Instruments Engineering Co. Ltd.
-
- TAMURA Hifumi
- Hitachi Instruments Engineering Co. Ltd.
-
- SEKI Setsuko
- Faculty of Engineering Takushoku University
Bibliographic Information
- Other Title
-
- ミニ突起法によるSIMSの深さ方向濃度分布測定精度の向上
Search this article
Journal
-
- 表面科学
-
表面科学 17 (3), 154-160, 1996-03-10
- Tweet
Details
-
- CRID
- 1571980073997547648
-
- NII Article ID
- 10002116991
-
- NII Book ID
- AN00334149
-
- ISSN
- 03885321
-
- Text Lang
- ja
-
- Data Source
-
- CiNii Articles