Surface Reaction of a Low-Flux Atomic Oxygen Beam witha Spin-Coated Polyimide Film:Synergetic Effect of Atomic Oxygen and Ultraviolet Exposures

• Masahito Tagawa

• Toru Suetomi

• Hiroshi Kinoshita

Bibliographic Information

Other Title

• Surface Reaction of a Low-Flux Atomic Oxygen Beam witha Spin-Coated Polyimide Film Synergetic Effect of Atomic Oxygen and Ultraviolet Exposures

Journal

• Transactions of the Japan Society for Aeronautical and Space Sciences

  Transactions of the Japan Society for Aeronautical and Space Sciences 42 (135), 40-45, 1999-05

  Tokyo : Japan Society for Aeronautical and Space Sciences

Details

• CRID: 1520573330703529472
• NII Article ID: 10002161117
• NII Book ID: AA0086707X
• ISSN: 05493811
• NDL BIB ID: 4718635
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4718635
• Text Lang: en
• NDL Source Classification:
  • ZN25(科学技術--運輸工学--航空機・ロケット)
• Data Source:
  • NDL
  • CiNii Articles