Studies of Super-Smooth Polishing on Aspherical Surfaces

• NEGISHI Mahito

  CANON Inc. Production Engineering Center

• ANDO Manabu

  CANON Inc. Production Engineering Center

• TAKIMOTO Masafumi

  CANON Inc. Production Engineering Center

• DEGUCHI Akinobu

  CANON Inc. Production Engineering Center

• NAKAMURA Norio

  CANON Inc. Production Engineering Center

収録刊行物

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 29 (1), 1-4, 1995-03-31

キーワード

• aspherical surface
• short wavelength
• super-smooth
• computer controlled polishing
• local pitch polishing
• contour measurement
• coordinate measuring machine
• contact probe
• toroidal mirror

詳細情報

• CRID: 1574231873798653440
• NII論文ID: 10002161148
• NII書誌ID: AA1080710X
• ISSN: 0916782X
• 本文言語コード: en
• データソース種別:
  • CiNii Articles