Measurement of Surface Roughness with Small Waviness by Contact Stylus Instrument Correcting Specimen Orientation

• CHO Nahmgyoo

  Graduate School of Science and Engineering, Tokyo Institute of Technology

• TSUKADA Tadao

  Faculty of Engineering, Tokyo Institute of Technology

• TAKAHASHI Masaaki

  Faculty of Engineering, Tokyo Institute of Technology

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 29 (1), 74-79, 1995-03-31

Keywords

• surface roughness
• measurement
• measuring instrument
• orientation
• profilometer
• control

Details

• CRID: 1574231873798695680
• NII Article ID: 10002161253
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles