Focused Ion Beam Assisted Etching of Aluminum

• ITOH Fumikazu

  Production Engineering Research Laboratory, Hitachi, Ltd.

• AZUMA Junzou

  Production Engineering Research Laboratory, Hitachi, Ltd.

• HARAICHI Satoshi

  Production Engineering Research Laboratory, Hitachi, Ltd.

• SHIMASE Akira

  Production Engineering Research Laboratory, Hitachi, Ltd.

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 29 (3), 211-216, 1995-09-30

Keywords

• Focused ion beam
• ion beam assisted etching
• LSI
• modification

Details

• CRID: 1571135649054805760
• NII Article ID: 10002161449
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles