Focused Ion Beam Machining of Diamond Chips and Probes

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著者

    • MIYAMOTO Iwao
    • Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo
    • KIYOHARA Shuji
    • Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo
    • IDE Masahiro
    • Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo
    • ITAMI Makoto
    • Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo
    • HONDA Satoshi
    • Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo

収録刊行物

  • International journal of the Japan Society for Precision Engineering  

    International journal of the Japan Society for Precision Engineering 29(4), 295-300, 1995-12-01 

参考文献:  10件

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各種コード

  • NII論文ID(NAID)
    10002161579
  • NII書誌ID(NCID)
    AA1080710X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    0916782X
  • データ提供元
    CJP書誌 
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